Used Semiconductor Equipment Refurbishment

Ichor Systems is a preferred supplier to Lam Research and the holder of the exclusive global license to sell Single Chamber Plasma Etch Equipment for Metal, Conductor and Dielectric applications. Ichor’s technical expertise and rigorous processes assure highest quality and lowest risk to meet customers' expectations when purchasing refurbished semiconductor equipment.

Premier Provider of Refurbished Processing Equipment

We provide expert refurbishment, design engineering and field services to the global semiconductor equipment market

Refurbished Tools Experts


Our comprehensive system refurbishment begins with a complete factory reset where OEM parts are repaired or replaced as standard or where applicable. The refurbished systems are tested to OEM specifications & documented along with core history analysis. Obsolescence management is practiced throughout the refurbishment process. Safety upgrades are provided to maintain compliance. When it's ready to ship, Ichor can provide on-site assistance with installation and process start-up as well as ongoing maintenance.

Legacy System Refurbishment Offerings

Dielectric Etch

The Rainbow™ 4520i Standalone system is a single wafer, vacuum load-locked, low pressure oxide system.

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Poly/Silicon Etch

The TCP® 9400 system uses Lam’s patented TCP® technology and offers several key benefits for polysilicon etch.

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Metal Etch

The TCP® 9600 system uses Lam’s patented TCP® technology and offers several key benefits for metal etch.

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Other Refurbished Tools

View Spec Sheets

Lam Rainbow®

Rainbow 4420 ● Rainbow 4520 ● Rainbow 4520i ● Rainbow 4520 XL ● Rainbow 4600 ● Rainbow 4700


TCP 9400 ● TCP 9600


AutoEtch 490 ● AutoEtch 590 ● AutoEtch 690 ● AutoEtch 790


Synergy ● Integra ● Series I ● Series II


Edwards 40/80 Chiller ● LAM 2080 Chiller

Buyer’s Guide to Refurbished Semiconductor Equipment

Where to BUY refurbished tools

How to find QUALITY used equipment

Guarantee the LOWEST RISK


OEM-Approved Vendor for Refurbished Semiconductor Tools

Ichor's technical expertise and rigorous processes provide the Ichor Advantage for highest quality and lowest risk to meet and exceed customers' expectations.

  • Factory certified technicians and parts
  • Matched performance to installed systems
  • Systems tested to OEM standards
  • Only critical OEM spares are used in refurbishement
  • Fully compliant with all mandatory safety upgrades
  • Access to OEM parts
  • Warranties beyond 90 days
  • Obsolescence engineering and service offerings

Inquire About Legacy Equipment and Parts


Find out more about our refurbished semiconductor equipment and legacy services, and reach out to us directly.

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Blogs About Refurbished Tools

Price vs. Risk in the Market for Used Semiconductor Equipment

When it comes to buying used semiconductor equipment, getting the best value involves more than just matching a price point. A number of factors determine the true value of the deal, from reliability of the product, to services and warranties included...

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Where to Buy Used Semiconductor Equipment

Traditionally, there are three basic ways for buyers to enter the used semiconductor equipment market: Open Market – work directly with brokers and resellers, Third Party Vendors – akin to buying a used car through a dealership, OEM’s – buying...

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