Gas Delivery Systems that set industry standards for size, configurability and uptime

Ichor Systems is a global leader in the design and manufacturing of advanced fluid and gas delivery systems, valves, and fittings for specialized high purity fabrication and process equipment. Our products have become the industry standard in the semiconductor industry and have also been applied to a range of other demanding industries including medical, aerospace, power generation, pharmaceutical, chemical and more. Ichor provides the most complex gas and fluid manifolds, custom weldments, and valves to the Semiconductor Industry. Our innovative TMS modular gas delivery system is the only platform capable of supporting all popular connections such as Face Seal, C-Seal, and W-Seal configurations while simultaneously reducing the footprint over conventional gas panels. The advantages of a modular architecture often lead to a significant cost reduction and increases in productivity. Our engineers went even further, designing systems that offer industry-leading benefits that provide even greater value, such as:

  • Integrated heating system
  • Reduced complexity, requiring fewer seals and less hardware
  • Faster assembly times
  • Quicker leak check times
  • Custom Gas Delivery Systems
  • Single sided serviceability
  • Easier to maintain
  • Less weight and shorter profile
  • Smaller footprint
  • Ability to add future gas lines
  • Stainless Steel Weld Fittings

The proprietary TMX C-Seal manufactured by Ichor will further enhance your productivity through improved sealing rates and reduced maintenance. We also offer a full line of accessories , face seal fittings and custom components and assemblies developed to meet even the most challenging requirements. Choosing diaphragm valves for your gas delivery system can often reduce lead times because we manufacture our products at our local CNC Machine Shops and stock many products in inventory. Need help engineering or configuring your system? Or, do you need custom components to complete your system design? Our engineers have the tools and expertise to rapidly bring your systems and concepts to life, and we can quickly ramp into full-scale production to meet your schedule requirements. Browse our Product Database to learn more about the Gas Delivery Systems manufactured by Ichor Systems, or call us at 320-251-0390 for additional information.