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  1. Surface Mount Accessories | Ichor Systems

Surface Mount Accessories

Most competitive modular gas delivery systems are limited by the availability of compatible accessories such as Ports, Flow Restrictors, Plugs, or Top Caps. Ichor is the only manufacturer that offers a full line of compatible surface mount accessories in both “surface mount” and “sandwich” configurations in virtually any material required.

  • Category
  • Surface Mount Accessories
Flow Through Caps PLUGS Flow Restrictors Component Ports
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Modular Gas Delivery System Accessories and Components

Most competitive modular gas delivery systems are limited by the availability of compatible accessories such as Ports, Check Valves, Flow Restrictors, Spool Pieces, or Top Caps. Ichor is the only manufacturer that offers a full line of compatible surface mount accessories in both “surface mount” and “sandwich” configurations. Read More...

Most competitive modular gas delivery systems are limited by the availability of compatible accessories such as Ports, Check Valves, Flow Restrictors, Spool Pieces, or Top Caps. Ichor is the only manufacturer that offers a full line of compatible surface mount accessories in both “surface mount” and “sandwich” configurations.

Examples of Modular Gas Delivery System Accessories and Components include:

  • Modular Flow Thru Caps
  • Modular Component Ports
  • Modular Top Plugs
  • MFC Flow Thru Caps
  • MFC Plugs
  • Manifold Tube Check Valves
  • Modular Flow Restrictors
  • Modular Metering Valves
  • Modular Check Valves
  • Top Mount Check Valves

These accessories are available in multiple configurations, including:

  • 1 1/8”, 1 ½” and 1 ½” High Flow
  • C-Seal or W-Seal
  • 1, 2 or 3 ports
  • Standard, High Purity or Ultra High Purity
  • Materials of construction can include:
    • 316L, VAR and VIM/VAR Stainless Steel
    • Nickel 200
    • 1, 2 or 3 ports
    • Monel 400
    • Hastelloy C-22

Additional information can be found in our Surface Mount Gas Delivery Accessories brochure, or search our Product Database for details. Ichor surface mount accessories are manufactured at our CNC Machine Shop near Minneapolis, MN. We keep most products in inventory so choosing Ichor for your gas delivery system can often significantly reduce order lead times. If your application requires custom components, contact Ichor Engineering Services today to design a custom solution to meet your requirements. Call us at 320-251-0390 for additional information and we’ll get right back to you.

About Us

Ichor is the leader in the design, engineering and manufacturing of critical fluid delivery subsystems and components for semiconductor capital equipment. Our products include the gas and chemical delivery subsystems that are key elements in the process tools used for commercial semiconductor device manufacturing.

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510.897.5200

3185 Laurelview Ct, Fremont, CA 94538

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