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  1. Modular Integrated Gas Systems | Ichor Systems

Modular Integrated Gas Systems (TMS)

Modular gas delivery systems are rapidly replacing conventional gas panels as the industry standard. Ichor’s TMS (Talon Modular System) gas delivery system offers a smaller envelope, configurability covering 1.125” standard flow to 1.50” high flow C and W-Seal, increased productivity and reduced maintenance time.

  • Category
  • Talon Modular Integrated Gas System (TMS)
1.125” C-Seal 1.125” W-Seal 1.500” C-Seal 1.500” W-Seal 1.500” HF C-Seal
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Modular Gas Delivery Systems

Modular gas delivery systems are rapidly replacing conventional gas panels as the industry standard. Read More...

Modular gas delivery systems are rapidly replacing conventional gas panels as the industry standard.

The benefits of the Ichor modular architecture over conventional systems are numerous:

Smaller Size: Modular systems are typically much smaller than conventional systems, minimizing space requirements and maximizing productivity per square foot of manufacturing space.

Configurability: Modular systems offer easily customizable configurations. Interconnected modules of flow components bolt together and allow for simple, last-minute reconfiguration as needed.

Easier to Maintain: Modular systems can be disassembled quickly for maintenance and upgrades, minimizing downtime.

Increased Productivity: When your gas delivery system requires less space, less time to assemble and maintain, and offers flexibility in configuration, you have a system that maximizes productivity and minimizes downtime. As a result, modular gas delivery systems are becoming the new industry standard.

The Talon Modular System provides the following advantages for your design:

  • Only modular platform that accommodates Face Seal, C-Seal, & W-Seal connections
  • Integrated heating system
  • Reduced complexity, requiring fewer seals and less hardware
  • Faster assembly times
  • Quicker leak check times
  • Single sided serviceability
  • Easier to maintain
  • Less weight and shorter profile
  • Smaller footprint
  • Ability to add future gas lines

Additional information can be found in our Modular Gas Delivery Platform brochure or you may search our Product Database for details.

Only Ichor Systems offers all these unique features in a modular gas delivery platform. For more information, or to speak with someone about Engineering Services to assist with your specific design, contact us at 320-251-0390 for more information.

About Us

Ichor is the leader in the design, engineering and manufacturing of critical fluid delivery subsystems and components for semiconductor capital equipment. Our products include the gas and chemical delivery subsystems that are key elements in the process tools used for commercial semiconductor device manufacturing.

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510.897.5200

3185 Laurelview Ct, Fremont, CA 94538

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