Ichor Diaphragm Valves set the standard in reliability and performance
Ichor Systems manufactures a full line of Conventional and Modular Diaphragm Valves, Modular Metering Valves and Check Valves that are engineered to meet or exceed all industry standards in performance and purity. Our Conventional Diaphragm Valve (CDV) series provides outstanding reliability and value for conventional mounting systems, and our modular Diaphragm Valve (MDV) series is engineered for modular, surface mount systems. All of our valves are engineered to meet SEMI specifications, provide outstanding reliability and performance, and are compatible with all competitive systems in the marketplace. Ichor Systems also manufactures all the substrates, components and accessories necessary to design a complete Modular Gas Delivery platform that saves space and improves uptime for semiconductor Gas Delivery Systems. Read More...
Ichor Systems manufactures a full line of Conventional and Modular Diaphragm Valves, Modular Metering Valves and Check Valves that are engineered to meet or exceed all industry standards in performance and purity. Our Conventional Diaphragm Valve (CDV) series provides outstanding reliability and value for conventional mounting systems, and our modular Diaphragm Valve (MDV) series is engineered for modular, surface mount systems. All of our valves are engineered to meet SEMI specifications, provide outstanding reliability and performance, and are compatible with all competitive systems in the marketplace. Ichor Systems also manufactures all the substrates, components and accessories necessary to design a complete Modular Gas Delivery platform that saves space and improves uptime for semiconductor Gas Delivery Systems.
Ichor’s Diaphragm Valves are available in the following configurations:
- Bodies made from:
- 316L Stainless Steel Diaphragm Valves
- 316L VAR Stainless Steel Diaphragm Valves
- Nickel 200 Diaphragm Valves
- Monel 400 Diaphragm Valves
- Hastelloy C-22 Diaphragm Valves
- Seats available in:
- PCTFE (Kel-F®) Diaphragm Valves
- 316L VAR Stainless Steel Diaphragm Valves
- VESPEL® Diaphragm Valves
- PEEK™ Diaphragm Valves
- PFA/ASTM D3307 Type II Diaphragm Valves
- Diaphragms are manufactured of Elgiloy®
- Surface mount (Modular) and conventional mount
Additional specifications for our valves can be found in our catalogs for Conventional Diaphragm Valves and Modular Diaphragm Valves. Ichor’s valves are manufactured at our CNC Machine Shop near Minneapolis, MN, and we keep most products in inventory to reduce your lead times. Whether you need a valve for a simple gas stick or for a complex gas panel, Ichor is your one stop source for all of your gas delivery system needs. If your application demands more than what you see available, contact Ichor Engineering Services today to design a custom solution to meet your requirements. Call us at 320-251-0390 for additional information about Ichor’s diaphragm valves and we’ll get right back to you.